An automated processing system has an indexer bay perpendicularly aligned
with a process bay within a clean air enclosure. An indexer in the
indexer bay provides stocking or storage for work in progress wafers or
articles. Process chambers are located in the process bay. A transfer
robot moves wafers from a pod unsealed at a docking station into a
carrier at a transfer station. The carrier has tapered or stepped outside
surfaces engaging corresponding inside surfaces on a rotor within a
process chamber. A process robot moves between the indexer bay and
process bay to carry wafers to and from the process chambers. The process
robot has a robot arm vertically moveable along a lift rail. Wafers are
carried offset from the robot arm, to better avoid contamination. The
automated system is compact and requires less clean room floor space.