Electrode substrates, a movable element which can freely move reciprocally by being guided by the electrode substrates, and in which electrodes are formed on a pair of surfaces thereof facing one another, and which has a lens, an image pickup element imaging an image which was image-formed by the lens, a control unit controlling a position of the movable element, and a stopper regulating movement of the movable element within the movable range thereof. The control unit positions the movable element at a predetermined position by making the movable element abut the stopper.

 
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> Exposing systems providing post exposure baking and related methods

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