An embodiment of the present invention provides a stepping actuator, comprising a suspended membrane comprising a plurality of movable electrodes connected by plurality of spring hinges to a payload platform; and anchors connecting said membrane to a substrate, said substrate comprising a plurality of fixed electrodes; wherein said movable electrodes of said suspended membrane and said fixed electrodes from said substrate form parallel-plate electrostatic sub-actuators.

 
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> Potassium niobate deposited body and method for manufacturing the same, surface acoustic wave device, frequency filter, oscillator, electronic circuit, and electronic apparatus

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