An area for layout of a plurality of I/O cells (called an "I/O area") is provided in the peripheral portion of a chip and signal wirings for transferring test signals to the I/O cells are provided in the layout direction of the I/O cells. At least one empty cell provided in the I/O area at a position where I/O cells are not provided has a repeater circuit which constitutes a transfer path for the test signal. The repeater circuit receives the test signal and outputs the test signal. This structure provides a suitable semiconductor integrated circuit device adaptable for an ASIC or the like, which can adjust the delay of a test signal to be transferred along the chip's peripheral portion by suppressing an increase in the delay and degradation in waveform depression.

 
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> Correcting a mask pattern by selectively updating the positions of specific segments

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