A process for the conversion of a substantially fluid phase substrate by heterogeneous contact of the substrate or a fragment or derivative thereof with a substantially solid phase agent wherein the solid phase agent is comprised as a surface of a support element or part thereof and the support element is adapted to rotate around an axis such that the solid phase agent provides a rotating surface or part thereof and the substrate provides a film flowing substantially radially outward from the axis in dynamic contact with the agent.

 
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> Ferroelectric capacitor, process for production thereof and semiconductor device using the same

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