A developing apparatus and method is provided in which the use amount of a
developing solution can be reduced without deteriorating the accuracy of
development. The developing apparatus comprises a new solution tank for
storing an unused developing solution and a used solution tank for
storing a used developing solution which is withdrawn from a material to
be treated. A new solution feeding nozzle extends from the new solution
tank, and the tip end of the nozzle faces toward the upper portion of the
cup of each developing unit. A used solution feeding nozzle extends from
the used solution tank, and the tip end of the nozzle faces toward the
upper portion of the cup of each developing unit.