A spectrophotometric instrument is comprised of a processor, a probe having a tissue engaging surface with an aperture therethrough and a light source producing measurement light signals and optically coupled to the probe via a first optical path. A partially reflective first reflecting member is located in the probe and has a generally elliptical profile positioned to reflect a first portion of the measurement light signals to the tissue aperture and to transmit a second portion of the measurement light signals through the first reflecting member. A second reflecting member is located in the probe and has a generally elliptical profile positioned to reflect the measurement light signals transmitted through the first reflecting member. A second optical path has a distal end positioned to receive the measurement light signals reflected off of the second reflecting member and a proximal end coupled to the processor. A third optical path has a distal end positioned in the probe to receive light signals transmitted through the tissue sample and a proximal end coupled to the processor.

 
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> Rapid thermal processing apparatus and method of manufacture of semiconductor device

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