An exposure apparatus includes a first land surface which faces a surface of a substrate and which surrounds an optical path space for an exposure light beam, a second land surfaces which faces the surface of the substrate and which is provided outside the first land surface in a predetermined direction, and a recovery port which is provided to recover a liquid for filling the optical path space therewith. The first land surface is provided subsequently in parallel to the surface of the substrate. The second land surface is provided at positions separated farther from the surface of the substrate than the first land surface. The recovery port is provided outside the first land surface and the second land surface. Even when the exposure is performed while moving the substrate, the optical path space for the exposure light beam can be filled with the liquid in a desired state.