A microelectromechanical systems (MEMS) apparatus (100) having a footprint
of about 1 to 10 millimeters by about 1 to 10 millimeters comprises a
movable member (101) that can be stopped at either of at least two
positions by electrically neutral stops (105, 107). Depending upon the
needs of a given application, these stops may all be fabricated using
materials deposition and removal techniques or some, though not all, may
comprise an attached component.