A scanning exposure apparatus for exposing a substrate (8) to a pattern
with an original (1) through a projection optical system (5), while
scanning the original and the substrate, includes a first detection
system (14c) which detects a first substrate reference mark (18c1, 18c3)
corresponding to the substrate through the projection optical system
on/at at least one of an optical axis of the projection optical and an
off-axis position shifted from the optical axis in a scanning direction,
and an alignment system (2, 9) which aligns the original and the
substrate on the basis of a detection result of the first detection
system.