A multilayer barrier film structure of an organic EL display panel has a multilayered body formed on a surface of a supporting substrate. The multilayered body includes an intermediate film sandwiched between inorganic films. The film structure includes a sealing region provided so as to surround the multilayered body on the surface of the supporting substrate. In a method of manufacturing an organic EL display panel comprising an organic EL device and a supporting substrate, a first inorganic film is formed so as to cover a surface of a supporting substrate, an intermediate film is formed on the first inorganic film, a second inorganic film is formed on the intermediate film, an organic EL device is formed on the second inorganic film, and a perimeter outside the organic EL device is subjected to heating or irradiation, to form a sealing region.

 
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