A capacitor has a tantalum oxynitride film. One method for making the film
comprises forming a bottom plate electrode and then forming a tantalum
oxide film on the bottom plate electrode. Nitrogen is introduced to form
a tantalum oxynitride film. A top plate electrode is formed on the
tantalum oxynitride film. Embodiments include a method of operating an
antifuse, comprising applying a voltage across electrodes of a capacitor
having a tantalum oxynitride film and forming a hole in the tantalum
oxynitride film.