An ozone disinfection apparatus is provided whereby the ozone is dispersed in a vapor. The use of an ozonated vapor increases saturation of the article, surface or area being disinfected. Ozone from a generator on-board the apparatus is forced into contact with a fluid, such as water, to form the vapor. Particle size of the vapor is controlled by passing the vapor through an atomizer.

 
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> METHOD FOR FORMING SEMICONDUCTOR FILM, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND ELECTROOPTIC DEVICE, APPARATUS FOR PERFORMING THE SAME, AND SEMICONDUCTOR DEVICE AND ELECTROOPTIC DEVICE

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