An imprinting apparatus including a plate unit, and a plurality of
imprinting modules provided on a lower surface of the plate unit. Each
imprinting module is self-aligned by a compliance of six degree of
freedom and vertically moved along with the plate unit by a controller.
The imprint module is independently self-aligned in response to surface
conditions of an objective material to compensate for a relative pose
error thereof, such that a pattern formed on a lower end of the
imprinting module can be imprinted on an upper surface of the objective
material within a predetermined unit range, and a sequence of imprinting
the pattern of the imprinting module on the objective material can be
variously controlled.