An alignment stage apparatus includes a base structure and a movable stage
which can move along a surface of the base structure so as not to be in
contact with the base structure. The apparatus includes a plurality of
power transmission coils buried under the surface of the base structure,
a power reception coil attached to the movable stage to oppose the
surface, a switching device for sequentially switching, of the plurality
of power transmission coils, those that are to be energized to feed power
in accordance with a position of the movable stage, and a power feeding
device for supplying AC power to the power transmission coils to be
energized through the switching device.