This invention includes a method of integrating into a semiconductor
specimen fabrication station a process diagnostic module that performs on
the semiconductor specimen a processing operation that otherwise would
not be performed by the processing components to thereby make the
fabrication station more efficient and flexible to use. The process
diagnostic module includes, for example, a specimen parameter measurement
system or a specimen inspection system and is configured to mount on a
front-opening interface mechanical standard (FIMS) load port and fits
within the allowable spatial envelope. This invention further includes
located external to the semiconductor specimen fabrication station a
processor that receives and processes data acquired by the process
diagnostic module during its operation.