A heat-dissipating module comprises a conductive part, a fan and a flow-guiding shield. The conductive part has a receiving plane being connected to the fan and fits with the flow-guiding shield. The fan has a fan wheel with a circular area measured with the diameter thereof greater than the receiving plane so that the fan wheel extends outward the receiving plane. The flow-guiding shield provides an inlet and an outlet and at least a guiding part is disposed at the inlet side. The guiding part receives fluid from the fan and the outlet fits with the conductive part. The fluid dragged by the fan wheel is received by and guided with the guiding part toward the conductive part.

 
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> Semiconductor processing temperature control

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