Inside a multilayer dielectric substrate, there are a spiral-shaped first slot set in a part of a first ground conductor layer and a spiral-shaped second slot in a part of a second ground conductor layer put on the front surface of the multilayer dielectric substrate, the first slot and the second slot are opposite in a spiral winding direction and the first slot and the second slot overlap with each other as viewed from the top face, so that a resonance phenomenon can be produced at a frequency lower than a resonance frequency of a resonator with a conventional structure.

 
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> High temperature spiral snake superconducting resonator having wider runs with higher current density

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