An optical microelectromechanical (MEMS) device includes a conductive
layer, a dielectric layer, a reflective layer and a plurality of
supporters between the dielectric layer and reflective layer. The
supporters are tapers, or inversed tapers, having an acute angle, wherein
a side surface of one of the supporters and the surface of the dielectric
layer form the acute angle. Each supporter comprises a horizontal
extending portion connecting to the reflective layer, such that the
reflective layer is suspended from the dielectric layer by a
predetermined gap.