A load lock system includes a load lock housing defining a load lock chamber, a substrate carrier platform configured to support a substrate carrier adjacent to the load lock housing, the substrate carrier having a substrate carrier door, and a load lock door to seal the load lock chamber. According to one aspect, the load lock system includes an attachment mechanism to secure the substrate carrier door to the load lock door and a door translation mechanism to move the load lock door and the substrate carrier door to and between an open position and a closed position. According to another aspect, the load lock system includes a load lock robot, located in the load lock chamber, to transfer a batch of substrates to and between the substrate carrier and the load lock chamber. The load lock robot includes a substrate pick which is configured to hold the batch of substrates in the load lock chamber for transfer to and from a process chamber.