A pattern measurement method includes acquiring graphic data of a
plurality of patterns including image data; processing the graphic data
to detect a coordinate of an edge point of the pattern; combining the
edge points between the patterns to make a pair of edge points and
calculating a distance between the edge points constituting each pair of
edge points and an angle between a straight line which connects the edge
point to the other edge point and an arbitrary axial line with respect to
each pair of edge points to prepare a distance angle distribution map
which is a distribution map of the calculated distance and angle of the
pair of edge points; and evaluating at least one of a relation of shape
between the patterns, a relation of size between the patterns, and a
relative location between the patterns on the basis of the prepared
distance angle distribution map.