To reduce cost of defect redundancy and trimming in a semiconductor
integrated circuit having multiple layer wirings and copper wirings, an
address for salvaging a defect of a memory cell array in a semiconductor
is stored by using a nonvolatile memory element constituting a floating
electrode by a first layer of polysilicon, or the nonvolatile memory
element is programmed in testing the semiconductor integrated circuit. As
a result, a special process is not needed in forming the nonvolatile
memory element. In other words, the nonvolatile memory element can be
formed in a process of forming a CMOS device and an apparatus of a laser
beam for programming is not needed since the programming is carried out
in testing. Thus, the time necessary for programming can be shortened,
and, therefore, testing costs can be reduced.