The present invention provides a light-enhancing component and a fabrication method thereof by using the focused-ion-beam. In the present invention, the surface plasmon polariton structure is coated on the surface of the optical fiber so as to form the light-enhancing component. When the light passes through the optical fiber, the luminous flux transmitted through the aperture on the surface plasmon polariton is enhanced, and the light beam smaller than the diffraction limitation can be transmitted to the far-field, i.e. the nano-optic sword is formed. The light-enhancing component of the present invention can be used for the optical data storage, the optical microscopy, the biomedical detections and the lithography to perform the extra optical resolutions beyond the diffraction limitation.

 
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> Illumination optical system, exposure apparatus, and device manufacturing method using the same

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