A MEMS directional sensor system capable of determining direction from a microphone to a sound source over a wide range of frequencies is disclosed. By utilizing a parallel filter bank that relies on a slow wave structure in a MEMS device, such as described herein, a very small microphone, on the order of a few micrometers, can be designed with unsurpassed ability to detect a sound source location.

 
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> Miniature condenser microphone and fabrication method therefor

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