A probe unit comprises a flexible substrate made of an inorganic substance and having an almost straight edge, an electro conductive film formed on a surface of the substrate and having a plurality of contact parts aligned on a surface of the edge and can contact with electrodes of a sample and lead parts connected to the contact parts, wherein the substrate is elastically deformed together with the contact part while the plurality of the contacts parts are supported by the edge when a force is added to press a surface of the contact part.