A piezoelectric thick film element array includes at least one piezoelectric element structure having a thickness between 10 .mu.m to 100 .mu.m formed by a deposition process. The at least one piezoelectric element is patterned during the deposition process, and includes a first electrode deposited on a first surface of the piezoelectric elements structure, and a second electrode deposited on a second surface of the piezoelectric element structure. In a further embodiment, several devices are provided using a piezoelectric element or an array having a piezoelectric element structure with a thickness of between 10 .mu.m to 100 .mu.m formed by a deposition process. These devices include microfluidic ejectors, transducer arrays and catheters.