An acetylene alcohol represented by the following formula, ##STR00001## wherein R.sup.1 represents a monovalent hydrocarbon radical having 4 to 10 carbon atoms with the carbon atom bonded to the silicon atom being a tertiary carbon, R.sup.2 and R.sup.3 each represents a monovalent group selected from the group consisting of alkyl groups having 1 to 4 carbon atoms and a fluorinated group represented by the formula, Rf--Q--, wherein Rf is a linear or branched perfluoroalkyl group having 3 to 100 carbon atoms which may be interrupted by one or more ether bonds, and Q is a divalent group having 2 to 10 carbon atoms which may be interrupted by one or more nitrogen, oxygen, or sulfur atoms, and n is zero or 1.