A method of measuring a pattern by using a display microscope image
comprises a step of setting an edge detection reference line by
designating a range of detecting an edge and a number of edge points with
regard to a respective side portion of the pattern in the microscope
image, a step of sampling the edge point constituting a point of changing
a brightness from image information by searching the edge point from a
direction orthogonal to the set edge detection reference line, a step of
providing a line approximating the respective side portion of the pattern
based on position information of a plurality of the edge points and a
step of specifying a shape of the pattern by an intersecting point of two
pieces of lines, a specified point provided by a plurality of
intersecting points, an angle made by two pieces of straight lines and a
distance between two specified points from information of the
approximated line approximating the respective side portion of the
pattern.