A method of making an OLED device that corrects for potential defect(s) identified in one processing station by adjusting a subsequent processing station includes processing an OLED substrate by adding at least one organic layer and measuring in-situ one or more parameters associated with such organic layer to produce a signal representative of potential defect(s) in a produced OLED device, and adjusting in a subsequent processing station in response to the signal to change the formation of a subsequent organic layer added to the OLED device to compensate for the potential defect(s).