It is a principal object of the present invention to provide low thermal expansion materials able to answer to the needs of various uses. The present invention relates to low thermal expansion materials constituted substantially from a crystalline body represented by a compositional formula RM(QO4)3, wherein R represents at least one selected from Zr and Hf, M represents at least one selected from Mg, Ca, Sr, Ba and Ra, and Q represents at least one selected from W and Mo.

 
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< Silver selenide film stoichiometry and morphology control in sputter deposition

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