An intradermal delivery device for delivery a substance into the skin of a patient has a fluid chamber for containing the substance, at least one micro skin penetrating member, and a valve controlling the flow of the substance from the fluid chamber to the micro skin penetrating member. An adhesive releasably attaches the device to the skin of the patient, the fluid chamber can be sized to hold a unit dose of the substance, and, in some embodiments, the fluid chamber can be releasably coupled to a housing of the device.