The present invention provides a method for the preparation of 5-azacytidine, wherein 5-azacytidine is represented by the structure: ##STR1## The method involves the silylation of 5-azacytosine, followed by the coupling of silylated 5-azacytosine to a protected -D-ribofuranose derivative. The coupling reaction is catalyzed by trimethylsilyl trifluoromethanesulfonate (TMS-Triflate).