A lens apparatus is disclosed which can achieve, an optical adjustment with a simple structure having a small number of parts. The lens apparatus has a lens unit, a lens holding member which holds the lens unit, a first holding member which holds the lens holding member, and a second holding member which holds the first holding member.

 
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< Objective lens driving apparatus

> Low-pass filter transmission line with integral electroabsorption modulator

> Optical reduction method with elimination of reticle diffraction induced bias

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