The invention provides a method for manufacturing an electro-optical device that is able to maintain the chemical and physical properties of the material layer in desired conditions. The organic electroluminescence display includes a plurality of layers including a low refractivity layer, a seal layer, a positive electrode, a luminous layer, a positive hole transfer layer and a negative electrode laminated on a substrate. The wet gel is dried by the supercritical drying method after being applied on the substrate in forming the low refractivity layer of the laminated layers.