A wiring of a semiconductor device and a method of manufacturing the same are
disclosed.
A first conductive layer is formed on a semiconductor substrate followed by a first
insulation material which is deposited on the first conductive layer to form a
first insulation layer. Then, a CMP process is implemented to form the first insulation
layer. A second insulation layer is formed by depositing a second insulation material
on the first insulation layer in order to cover a scratch formed on the first insulation
layer after implementing the CMP process. A first etching pattern is formed by
etching the second insulation layer to a thickness less than a thickness of the
second insulation layer. Thereafter, a conductive material is deposited on the
etching pattern and then a planarizing process is implemented to form a conductive
pattern having a damascene shape. The formation of a bridge between neighboring
conductive patterns caused by a scratch generated during implementation of CMP
process can be prevented to markedly decrease defects in semiconductor devices.