An exposure apparatus is provided which has an optical system for projecting a pattern of an original onto a substrate and projects the pattern onto the substrate with a space between the optical system and the substrate filled with liquid. The apparatus includes a supply unit, having a nozzle, to supply liquid into the space through the nozzle, and a suppressing unit to suppress leakage of liquid from the nozzle.

 
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> Process for concentration of antibodies and therapeutic products thereof

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