The present invention contemplates a simplified laser oscillator-amplifier system for deep UV generation. The simplified system employs same type of gain media in both the oscillator and the amplifier and utilizes a single pump pulse split to pump both the oscillator and the amplifier. A short cavity oscillator is operated near lasing threshold to produce a seed pulse with a narrow spectral bandwidth and long pulse duration. A short cavity amplifier is Q-switched to amplify the seed pulse to produce a single short pulse with good energy extraction efficiency. The amplifier is simply a short cavity, Q-switched laser. Short pulse is obtained with short cavity length and high gain of the amplifier. Consequently, the simplified laser oscillator-amplifier system can accommodate a long pump pulse to produce a nanosecond pulse suitable for deep UV laser generation.

 
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