A MEMS device having a deformable mirror. In a representative embodiment, the
MEMS
device includes a deformable membrane supporting a plurality of light-reflecting
segments that form the deformable mirror. One or more actuators, at least one of
which is configured to apply torque to a side of the membrane, are used to deform
the membrane. Membrane deformation causes the segments to change orientation and
thereby change the shape of the minor. A representative MEMS device of the invention
enables segment displacements in two directions and thereby realizes effective
mirror curvature values in the range from about -2 mm-1 to about +2 mm-1.