A laser system for producing a laser beam, the laser system having top and bottom heat-sinking bars forming the structure of the laser system and plurality of disks comprising a laser material mounted on both the bottom heat-sinking bar and the top heat-sinking bar. Also mounted on both heat-sinking bars is a plurality of pump diode bars. Each pump diode bar is preferably mounted opposite a corresponding laser disk on the opposite heat-sinking bar. The pump diode bars and the disks are symmetrically mounted on the top and bottom heat-sinking bars, so that each heat-sinking bar has an alternating pattern of pump diode bars and laser disks. The laser system is configured such that the lasing beams impinge on the disks with an incidence angle far off normal.

 
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< Semiconductror fabricating apparatus

< High power semiconductor laser device

> Excimer or molecular fluorine laser with several discharge chambers

> Radiation generating apparatus, radiation generating method, exposure apparatus, and exposure method

~ 00232