An article of manufacture, method, and apparatus are provided for planarizing
a substrate surface. In one aspect, an article of manufacture is provided for polishing
a substrate including a polishing article having a body comprising at least a portion
of fibers coated with a conductive material, conductive fillers, or combinations
thereof, and adapted to polish the substrate. In another aspect, a polishing article
includes a body having a surface adapted to polish the substrate and at least one
conductive element embedded in the polishing surface, the conductive element comprising
dielectric or conductive fibers coated with a conductive material, conductive fillers,
or combinations thereof. The conductive element may have a contact surface that
extends beyond a plane defined by the polishing surface. A plurality of perforations
and a plurality of grooves may be formed in the articles to facilitate flow of
material through and around the polishing article.