A robot arm is presented, which inserts and removes an object from a conditioned environment using a carrier connected to the robot arm. The robot arm is positioned in a conditionable vessel, a wall of which vessel may deform when the interior is conditioned. Since the trajectory of the robot arm needs to be accurate, the robot arm is flexibly coupled to the vessel wall such that an orientation of the robot arm is independent from an orientation of the vessel wall. Further, a docking system is disclosed for use in a device comprising a robot arm having a carrier connected thereto.

 
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< Lithographic apparatus and device manufacturing method

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> Managing structure for umbilical member of industrial robot

> End effector with force controlling mechanism

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