A process for protecting at least two robots is provided, especially multiaxial industrial robots, from collisions, in which movements of a robot are automatically checked for possible collisions. Interlocks are automatically inserted in the movement process.

 
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< Method and system for controlling a robot

< Robot system

> Method and device for improving the positioning accuracy of a manipulator

> Substrate processing apparatus and substrate processing method which performs predetermined processing on a substrate which is positioned approximately horizontally at a substrate processing position
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