Disclosed is an exposure apparatus for printing, by exposure, a pattern of an original on a substrate, which includes a housing tightly filled with a predetermined ambience and for accommodating therein at least a portion of an exposure light optical axis, and a detection system having an optical system, wherein a portion of a light path of the detection system is disposed in a first space enclosed by the housing, and wherein at least another portion of the detection system including an electric element thereof is disposed in a second space outside the housing.

 
Web www.patentalert.com

< Facilitating commerce among consumers and service providers by matching ready-to-act consumers and pre-qualified service providers

< Peer-to-peer name resolution protocol (PNRP) and multilevel cache for use therewith

> Programmable differential internal termination for a low voltage differential signal input or output buffer

> High voltage level shifting IC with under-ground voltage swing withstanding capability

~ 00222