Optical waveguide composite materials and integrated optical subsystems with low loss connection to optical fibers, are disclosed. The waveguide material has a varying thickness and/or refractive index from one portion (816) to another (820) and can be varied in all three directions. Methods of producing the composite materials and waveguides are also disclosed.

 
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> Optical waveguides formed from nano air-gap inter-layer dielectric materials and methods of fabrication thereof
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