A method for treating a dielectric material using hydrocarbon plasma is described, which allows for thinner films of barrier material to be used to form a robust barrier.

 
Web www.patentalert.com

< Catalyst for the generation of CO-free hydrogen from methane

< Differential planarization

> Method for the production of electrocatalyst powders

> Method for preparing efficient low voltage multilayer phosphor films
~ 00212