A method and system for high-speed, precise micromachining an array of devices
are disclosed wherein improved process throughput and accuracy, such as resistor
trimming accuracy, are provided. The number of resistance measurements are limited
by using non-measurement cuts, using non-sequential collinear cutting, using spot
fan-out parallel cutting, and using a retrograde scanning technique for faster
collinear cuts. Non-sequential cutting is also used to manage thermal effects and
calibrated cuts are used for improved accuracy. Test voltage is controlled to avoid
resistor damage.