An apparatus for manufacturing a substrate includes: a transferring chamber extended along a long direction; at least one process chamber connected to the transferring chamber along the long direction; at least one load-lock chamber connected to the transferring chamber at least one side of the transferring chamber; and a transferring chamber robot moving along the long direction in the transferring chamber and transferring a substrate.

 
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< Substrate gripping apparatus, substrate gripping method and substrate releasing method

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> Robot for carrying out industrial operations by a laser beam

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