In one aspect of the invention is a method to construct plasma chambers with
improved
wall resistance to deterioration. In one embodiment of the invention, a chamber
is made of an aluminum alloy having low concentrations of elements that form non-soluble,
intermetallic particles to address coating/substrate issues, has swaged-in cooling
tubes to reduce thermal stress by improving thermal resistance, and has a plurality
of dielectric gaps to decrease ion bombardment.