An organic solvent is separated from a waste stream containing supercritical CO₂, an organic solvent and etchant contaminants. The process includes separating the supercritical CO₂ by subjecting the waste stream to elevated temperature and/or reduced pressure to thereby obtain a first composition containing the supercritical CO₂ and a second composition containing the organic solvent and being substantially free of the supercritical CO₂; and then removing non-volatile etching contaminants from the second stream search as by at least one of the following:

• evaporation;
• distillation;
• filtration;
• centrifugation;
• and settling.