A beam spot size enlarger waveguide for enlarging the beam spot size is connected to a beam spot size reducer waveguide for shrinking the beam spot size, along with the direction of the propagation of light beam; or the beam spot size enlarger waveguide, a beam spot size maintainer waveguide for maintaining the beam spot size constantly, and the beam spot size reducer waveguide are connected in the direction of the propagation of light beam.

 
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